MEMS Mirrors

MEMS Mirrors

MEMS Mirrors

Sercalo

Sercalo produces MEMS Micromirrors based on different technologies:

  • Electrostatic driven MEMS mirrors are used in applications where a high pointing stability is required. The electrostatic drive has better DC performance and is the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, fiber optic switches and tunable optical filters. Mirror diameters range from 0.8 mm up to 2.5 x 2.0 mm.
  • The Magnetic MEMS micro-mirrors offer larger diameters and are best suited in applications requiring DC pointing together with dynamic scanning. Magnetic 1D and 2D micro-mirrors have a linear current angle response.

Product Part NumberShort DescriptionMirror DiameterResonance FrequencyPackage Style
MM2536-2Dual Axes Magnetic Mirror(A X B) 2.5 X 3.6 mm2X: 350 - 390 Hz / Y: 200 - 240 Hz
MM160110-2Dual Axes Magnetic Mirror(A X B) 16.0 X 11.0 mm2X: 315 - 330 Hz / Y: 170 - 180 Hz
TM10Dual Axes Magnetic MirrorX: 700 Hz / Y: 700 HzTO46
TM2520Dual Axes Magnetic MirrorX: 170 Hz / Y: 360 HzTO46