MEMS Mirrors
Quick Overview
Sercalo produces MEMS Micromirrors based on different technologies:
Electrostatic driven MEMS mirrors are used in applications where a high pointing stability is required. The electrostatic drive has better DC performance and is the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, fiber optic switches and tunable optical filters. Mirror diameters range from 0.8 mm up to 2.5 x 2.0 mm.
The Magnetic MEMS micro-mirrors offer larger diameters and are best suited in applications requiring DC pointing together with dynamic scanning. Magnetic 1D and 2D micro-mirrors have a linear current angle response.
| Product Part Number | Short Description | Mirror Diameter | Resonance Frequency | Package Style | |
|---|---|---|---|---|---|
| MM2536-2 | Dual Axes Magnetic Mirror | (A X B) 2.5 X 3.6 mm^2 | X: 350 – 390 Hz / Y: 200 – 240 Hz | ||
| MM160110-2 | Dual Axes Magnetic Fine Steering Mirror | (A X B) 16.0 X 11.0 mm^2 | X: 290 – 315 Hz / Y: 167 – 175 Hz | ||
| TM10 | MEMs Electrostatic Mirror | X = 1000 µm, Y = 1000 µm | X: >700 Hz / Y: >700 Hz | TO46 | |
| TM2520 | MEMs Electrostatic Steering Mirror, Large Static Deflection | X = 2400 µm, Y = 2000 µm | X: 170 Hz / Y: 360 Hz | TO5 |