Features
- Low drift
- 2 independent axes
- Continuous tilting
- Single mirror
- 1 mm diameter mirror
- High fill factor
Applications
- Optical Beam Steering
- Reconfigurable Add-Drop Multiplexer
- Vibration control in free space optics
- Optical Processor
TM10
Quick Overview
MEMs Electrostatic Micro Mirrors – The sercalo MEMS 3D mirrors are used for precise optical beam steering. To avoid an optical feed back loop, the micromirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation.
| Name | TM10 |
|---|---|
| Description | MEMs Electrostatic Mirror |
| Tilt Angle | X (Mechanical) @ 40 V = ± 3.5° / Y (Mechanical) @ 40 V = ±3.5° |
| Max Actuation Voltage | Typ. 40 V, Max 44 V |
| Reflectivity | (900-2000 nm) 95 % |
| Surface Finish | Gold or Aluminum |
| Mirror Size | X = 1000 µm, Y = 1000 µm |
| Resonance Frequency | X: >700 Hz / Y: >700 Hz |
| Package Style | TO46 |